| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a monochromator capable of improving wavelength resolution. Ž<P>SOLUTION: The monochromator 1 comprises: a collimator 3 converting incident light from an incident part 2 to collimated light; first and second diffraction gratings 4 and 5 one of which that disperses/separates the incident light is rotatable; a first corner mirror 6 reflecting the light from the second diffraction grating 5; a condenser 7 in which the light folded back by the first corner mirror 6 is again incident on the second diffraction grating 5 and the first diffraction grating 4 and the diffraction light is condensed; a first slit 8 provided at the light condensing position; a second corner mirror 9 changing the optical path of the condensed light; and a second slit 10 arranged at a position where the light passing through the first slit 8 is again dispersed/separated and condensed via the first diffraction grating 4, the second diffraction grating 5, the first corner mirror 6, the second diffraction grating 5, the first diffraction grating 4, and the collimator 3 in this order. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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