| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high-sensitivity and small pressure sensor which is not easily broken even when an excessive pressure is applied. Ž<P>SOLUTION: A diaphragm section 2 has: a mesh-like beam section 2a which partitions the diaphragm section 2 into a plurality of rectangular regions; and a thin film section 2b formed in the region partitioned by the beam section 2a, and the thickness of the thin film section 2b is less than that of the beam section 2a. Compared with the case where the thickness of the diaphragm section 2 is uniformly the same as the thickness of the beam section 2a, a displacement quantity of the diaphragm section 2 per unit pressure is increased. Compared with the case where the thickness of the diaphragm section 2 is uniformly the same as the thickness of the thin film section 2b, a pressure resistance is increased, since the total area of the thin film section 2b is smaller than the area of the whole diaphragm section 2. Thus, according to the pressure sensor 1, the high-sensitivity and small pressure sensor which is not easily broken even when an excessive pressure is applied is provided. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
|
