发明名称 MULTIVARIATE FAULT DETECTION IMPROVEMENT FOR ELECTRONIC DEVICE MANUFACTURING
摘要 An importance factor generator system for providing an overall importance factor to be used in normalizing variables for multivariate modeling. An importance factor generator system assigns a sensor importance factor (IF) to a sensor, where the sensor IF indicates the importance of the sensor relative to other sensors. The importance factor generator system assigns a recipe step IF to a recipe step, where the recipe step IF indicates the importance of the recipe step relative to other recipe steps. The importance factor generator system can calculate an overall IF using the sensor IF and recipe step IF and provide the overall IF to be used for normalizing variables for multivariate modeling results. The importance factor generator system can display the overall IF in a graphical user interface (GUI).
申请公布号 US2009282296(A1) 申请公布日期 2009.11.12
申请号 US20090368164 申请日期 2009.02.09
申请人 APPLIED MATERIALS, INC. 发明人 LIN Y. SEAN
分类号 G06F11/07 主分类号 G06F11/07
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