| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a galvano motor which scans or deflects an optical axis of light with high accuracy and high response. Ž<P>SOLUTION: The galvano motor 10 includes a motor shaft 1, a coil 5 which rotationally drives the motor shaft 1, and an encoder scale 6 which is joined to one end of the motor shaft 1, the motor shaft 1 is configured so that a mirror 9 which is heavier than the encoder scale 6 is joined at the other end opposite to the one end to which the encoder scale 6 is joined, a phase crossover frequency fphase in open-loop characteristics of the galvano motor 10, a torsion resonance frequency fscale between a center part of the motor shaft 1 and the encoder scale 6, and a torsion resonance frequency fmirror between the center part of the motor shaft 1 and the mirror 9 satisfy the relation of fphase<fscale≤fmirror, and phases at the torsion resonance frequencies fscale and fmirror are other than -180 degrees. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
|
