| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a rocking member apparatus with which a relatively high resonance frequency of an oscillation system is derived by a resonance frequency detection operation, and to provide a method of detecting the resonance frequency. Ž<P>SOLUTION: The rocking apparatus has: an oscillation system 100 having a rocking member; a driving part 120 which drives the oscillation system; detection means 140 and 152; a driving amplitude control part 154; and a driving frequency control part 156. The detection means detects the rocking amplitude of the rocking member. The driving amplitude control part performs a feedback control of the amplitude of a driving signal. The driving frequency control part controls the frequency of the driving signal input to the driving part 120. In the resonance frequency detection operation, the feedback gain of the driving amplitude control part 154 is set at a lower value than the feedback gain at other operating states, and the driving amplitude control part controls the driving amplitude so that the detected rocking amplitude may become a target value. In this state, the driving frequency control part determines the driving frequency at which the driving amplitude becomes minimum as the resonance frequency of the oscillation system on the basis of the frequencies at the respective driving states at a plurality of driving frequencies and the controlled amplitude. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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