| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a three-dimensional shape measuring device capable of improving measurement accuracy of a distance between a shape measuring device and the surface of a measuring object without depending only on sampling frequencies of a distance counter P and a width counter W. Ž<P>SOLUTION: A plurality of thresholds are set on a distribution of reflected light by a CCD line sensor part, and a distance counter value P and a width counter value W are acquired based on each threshold respectively. Then, each distance counter value and each width counter value are added together, and a resolution is acquired, which is equivalent to the case where a sampling frequency is heightened substantially by utilizing each value by the plurality of thresholds acquired by fluctuation of a signal of a CCD element, to thereby calculate a more accurate distance to the measuring object. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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