| 摘要 |
<P>PROBLEM TO BE SOLVED: To analyze particulates without lowering the efficiency of excitation, even if the particle sizes of the particulates are shorter than the wavelength of an exciting laser beam. Ž<P>SOLUTION: A particulate analyzer includes a pulse laser device constituted so that a gas region 74, where a fluid containing the particulates 100 to be analyzed and a medium gas constituted of materials different from the particulates 100 to be analyzed are present, is irradiated with the exciting laser beam to turn the fluid and the medium gas present in the gas region plasmatic, a spectroscope 66 for detecting the light emitted when the fluid and medium gas turned plasmatic in the gas region 74 are returned to the original energy state from an exciting laser plasma state to spectrally diffract the same, a CCD camera 68 for imaging the light spectrally diffracted by the spectroscope 66 to form an image signal and a computer 70 for subjecting the image signal from the CCD camera 68 to image processing to analyze the component of the particulates 100. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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