| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an internal structure measuring instrument for positioning a probe with high precision and efficiently executing measuring work. Ž<P>SOLUTION: The internal structure measuring instrument has: a robot equipped with the probe and a pair of cameras; a memory means for storing three-dimensional coordinates of a measuring region; an image processing means which analyzes the image acquired by a pair of the cameras to calculate a correction value for eliminating the shift of the estimated present position and actual present position of the measuring region from the coordinates and receiving a probe signal to evaluate the internal structure of a member; and an operation control means for correcting the operation of the robot on the basis of the correction value. The memory means and the operation control means detect the shift quantity from the three-dimensional coordinates of the measuring region to a focus (ST04) to confirm whether the shift quantity is zero (ST05) and corrects the shift quantity (ST06) to move the probe over a definite distance (ST07). The probe is thereby positioned with high precision and measuring work is efficiently done. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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