摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for observing the internal texture of a material hardly soluble in a solvent, performing not only the microanalysis of impurities over a wide range in a sample but also the judgment of the internal flaw state of the sample. Ž<P>SOLUTION: A measuring target comprising a material hardly soluble in a solvent is ground and the concentration of the element in the ground surface of the measuring target is measured by a glow discharge mass analyzing method. After the concentration of the element is measured, the topology of the ground surface is measured by a probe type surface roughness meter and the internal flaw state of the measuring target is judged from the obtained concentration of the element and the measuring result of the topology. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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