Method for calibrating simulation method for simulating manufacturing step of component, involves producing preliminary structure during predetermined condition, and structure by preliminary structure

摘要

The method involves producing a preliminary structure during the predetermined condition, and a structure by the preliminary structure. Other preliminary structures are produced during another predetermined condition, and other structures are produced by other preliminary structures. A parameter is measured at the former preliminary structure, in order to obtain a characterization value. Independent claims are included for the following: (1) a method for calibrating a simulation method for a mask for structuring; (2) a method for simulating the mask for structuring; (3) a method for producing the mask; (4) a method for manufacturing a component; (5) a computer-program with a program code for the execution of method; and (6) a method for simulation of manufacturing steps of a component.