METHOD OF SELF-ASSEMBLY GROWING CARBON NANOTUBESS BY CHEMICAL-VAPOR-DEPOSITION WITHOUT THE USE OF METAL CATALYST

摘要

A method of self-assembly growing carbon nanotubes by chemical-vapor-deposition without the use of metal catalyst is provided, wherein a horizontal vacuum-tube type high-temperature furnace is heated to 940~980 °C and the temperature is held under the protection of a carrier gas, then a mixed gas of carbon source gas and carrier gas is fed, The decomposed product of the carbon source gas is deposited on a substrate in the low temperature area of the high-temperature furnace, and hence to self-assembly grow carbon nanotubes. The said carbon source gas is a carbon-containing material in gaseous state. The said carrier gas is one or two or more selected from nitrogen, hydrogen, and argon. Since the use of metal catalyst is omitted, the obtained carbon nanotubes contain no metal catalyst; therefor the purity of the product is improved with a low cost, and the product can be produced continuously.