发明名称 LINEAR MOTOR DRIVER AND STAGE SYSTEM
摘要 <P>PROBLEM TO BE SOLVED: To reduce a thrust ripple by absorbing an abrupt current component generated on switching motor coil magnetization. <P>SOLUTION: A transient current absorbing circuit, on switching magnetization, is provided to a switch for switching magnetizing of a motor coil while the switch is arranged between the motor coil and a drive circuit for a linear motor of magnetizing switching type MM system. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009268296(A) 申请公布日期 2009.11.12
申请号 JP20080116862 申请日期 2008.04.28
申请人 NIKON CORP 发明人 KOSUMI YUKIHIRO;NAGASAWA MASAYA;SAWADA AKITO
分类号 H02P25/06 主分类号 H02P25/06
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