摘要 |
A double gate transistor on a semiconductor substrate (2) includes a first diffusion region (S2), a second diffusion region (S3), and a double gate (FG, CG). The first and second diffusion regions (S2, S3) are arranged in the substrate spaced by a channel region (CR). The double gate includes a first gate electrode (FG) and a second gate electrode (CG). The first gate electrode is separated from the second gate electrode by an interpoly dielectric layer (IPD). The first gate electrode is arranged above the channel region and is separated from the channel region by a gate oxide layer (G). The second gate electrode is shaped as a central body. The interpoly dielectric layer is arranged as a conduit-shaped layer surrounding an external surface (A1) of the body of the second gate electrode. The interpoly dielectric layer is surrounded by the first gate electrode.
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