发明名称 Double Gate Transistor and Method of Manufacturing Same
摘要 A double gate transistor on a semiconductor substrate (2) includes a first diffusion region (S2), a second diffusion region (S3), and a double gate (FG, CG). The first and second diffusion regions (S2, S3) are arranged in the substrate spaced by a channel region (CR). The double gate includes a first gate electrode (FG) and a second gate electrode (CG). The first gate electrode is separated from the second gate electrode by an interpoly dielectric layer (IPD). The first gate electrode is arranged above the channel region and is separated from the channel region by a gate oxide layer (G). The second gate electrode is shaped as a central body. The interpoly dielectric layer is arranged as a conduit-shaped layer surrounding an external surface (A1) of the body of the second gate electrode. The interpoly dielectric layer is surrounded by the first gate electrode.
申请公布号 US2009278186(A1) 申请公布日期 2009.11.12
申请号 US20070304388 申请日期 2007.06.06
申请人 NXP B.V. 发明人 SONSKY JAN;VAN DUUREN MICHIEL J.
分类号 H01L29/788;H01L21/336 主分类号 H01L29/788
代理机构 代理人
主权项
地址