| 摘要 |
<p>A conveyor, and a film-forming apparatus and a maintenance method thereof. In a conveyor comprising a frame, a lower supporting mechanism for supporting a carrier on which a substrate is vertically mounted and conveying the carrier, and an upper supporting mechanism for supporting the carrier, the frame is composed of a lower frame and an upper frame, the lower supporting mechanism is provided in the lower frame, the upper supporting mechanism is provided in the upper frame, and the upper frame is movable separately from the lower frame. By rotating the upper frame, a cathode member can be placed in a space formed above the lower frame, so that the distance between a film-forming processing path and a carrier conveyance path can be narrowed. Accordingly, a courtyard of the film-forming apparatus can be narrowed, so that in the conveyor which can convey the carrier and the film-forming apparatus including this conveyor and further including a vacuum processing device and a conveyance system, the installation area thereof can be narrowed.</p> |
