发明名称 ROLLER UNIT AND APPARATUS FOR PROCESSING A GLASS INCLUDING THE SAME
摘要 <p>PURPOSE: A roller unit and an apparatus for processing a glass including the same are provided to use a space more efficiently by installing an injection nozzle for chemical and a roller supporting the substrate at the same place. CONSTITUTION: In a roller unit and an apparatus for processing a glass including the same, a chemical(C) is flowed from the outside through a hollow shaft. The rollers are installed to be rotatable with along the longitudinal direction and supports a substrate(G). Injection nozzles(330) are installed along the longitudinal direction and sprays a chemical on the substrate. A processing chamber(100) provides a space for disposing of a substrate, and an air sprayer(500) sprays the air to the substrate. The injection nozzle is protruded to a parallel direction with a substrate from the shaft.</p>
申请公布号 KR20090116915(A) 申请公布日期 2009.11.12
申请号 KR20080042723 申请日期 2008.05.08
申请人 SEMES CO., LTD. 发明人 LEE, DONG YUN
分类号 H01L21/304;H01L21/677 主分类号 H01L21/304
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