MICROMECHANICAL HOUSING COMPRISING AT LEAST TWO CAVITIES HAVING DIFFERENT INTERNAL PRESSURE AND/OR DIFFERENT GAS COMPOSITIONS AND METHOD FOR THE PRODUCTION THEREOF

摘要

The invention relates to a multiple component which is to be subsequently individualised by forming components containing active structures, in addition to a corresponding component which can be used in microsystem technology systems. Said multiple component and/or component comprises a flat substrate and also a flat cap structure which are bound to each other such that they surround at least one first and one second cavity per component, which are sealed against each other and towards the outside. Said component is characterised in that the first of the two cavities is provided with getter material and due to said getter material has a different internal pressure and/or a different gas composition than the second cavity. The invention also relates to a method for producing said type of component and/or components for which gas mixtures of various types of gas have a different absorption ratio in relation to the getter material.