发明名称 METHOD OF TREATING SODA-LIME GLASS SUBSTRATE AND METHODE OF MANUFACTURING DISPLAY SUBSTRATE USING THE SAME
摘要 PURPOSE: A method of treating a SLG(Soda-Lime Glass) substrate and a method of manufacturing display substrate using the same are provided to reduce defect due to adherence foreign material of a SLG substrate by cleaning the SLG substrate with alkali cleaning solution. CONSTITUTION: A method of treating a SLG substrate(101) comprises following steps. The SLG substrate is cleaned with alkali cleaning solution. The washed SLG substrate is washed through a plasma process. The alkali cleaning solution contains the alkali material of 1~25% concentration. The plasma process uses one among nitrogen gas, ammonia gas, and hydrogen gas.
申请公布号 KR20090117457(A) 申请公布日期 2009.11.12
申请号 KR20080043508 申请日期 2008.05.09
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 WHANGBO, SANG WOO;SHIN, BONG KYU;LIM, SANG UK;SOUK JUN HYUNG;JU, JIN HO
分类号 B08B3/04;G02F1/13;G02F1/1333 主分类号 B08B3/04
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