发明名称 Hard coating film and target for formation thereof
摘要 A hard coating film having oxidation resistance and wear resistance superior to those of conventional coating films formed of TiAlN, TiCrAlN, TiCrAlSiBN, CrAlSiBN, NbCrAlSiBN, or the like. The hard coating film of the present invention has a component composition represented by the formula: €ƒ€ƒ€ƒ€ƒ€ƒ€ƒ€ƒ€ƒ(Ti a Cr b Al c M d B e ) (C x N 1-x ), wherein 0 ‰¤ a ‰¤ 0.2, 0.05 ‰¤ b ‰¤ 0.4, 0.45 ‰¤ c ‰¤ 0.65, 0.005 ‰¤ d ‰¤ 0.05, 0 ‰¤ e ‰¤ 0.15, a + b + c + d + e = 1, and 0 ‰¤ x ‰¤ 0.5; where M denotes at least one species selected from the group consisting of Ce, Pr, and Sc; variables a, b, c, d, and e indicate the atomic ratios of Ti, Cr, Al, M, and B respectively; and variable x indicates the atomic ratio of C.
申请公布号 EP2116628(A1) 申请公布日期 2009.11.11
申请号 EP20090003302 申请日期 2009.03.06
申请人 KABUSHIKI KAISHA KOBE SEIKO SHO (KOBE STEEL, LTD.) 发明人 YAMAMOTO, KENJI;FOX-RABINOVICH, GERMAN
分类号 C23C14/06;B23C5/10;C23C30/00 主分类号 C23C14/06
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