MANUFACTURING METHOD OF PIEZOELECTRIC ELEMENT AND LIQUID JETTING HEAD

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a piezoelectric element which prevents the occurrence of a defect on a region of a piezoelectric layer not covered with an electrode beforehand and secures a stable prescribed operation over a long time.SOLUTION: A manufacturing method of a piezoelectric element having an upper electrode 40 and a lower electrode 20, a piezoelectric layer 30 which is held between the upper electrode 40 and the lower electrode 20 and has a first part 3a superposed on the upper electrode 40 and a second part 3b not superposed on the upper electrode and a protective film 80 which applies at least a part of an end part of the upper electrode 40 and is formed while striding over the first part 3a and the second part 3b includes: a film forming process of forming a film striding over the first part 3a and the second part 3b by using a precursor which is made of single kind of atoms and does not contain hydrogen; and an oxidation process of oxidizing the film formed on the film forming process to manufacture a protective film 80.SELECTED DRAWING: Figure 1