AUTOMATIC OPTICAL INSPECTION APPARATUS

摘要

PURPOSE: An AOI(Automatic Optical Inspection) apparatus is provided to inspect a target object precisely by capturing images of the target object in different directions two or three dimensionally. CONSTITUTION: An AOI apparatus includes an X-Y stage(10), a beam splitter(20), first illuminating units(30), second illuminating units, first imaging units(50), and second imaging units(60). The first illuminating units are located between the X-Y stage and the beam splitter in the edge direction of the X-Y stage, and irradiate two-dimensional light to a target object(P) in multiple directions. The second illuminating units are installed on one side of the beam splitter, and irradiate lattice light to the target object through the beam splitter. The first imaging units capture two dimensional images reflected off the target object by the two dimensional light. The second imaging units capture lattice images reflected off the target object by the lattice light.