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发明名称
摘要
申请公布号
JP4360413(B2)
申请公布日期
2009.11.11
申请号
JP20070084027
申请日期
2007.03.28
申请人
发明人
分类号
H01L21/762;H01L21/76;H01L27/12;H01L29/786
主分类号
H01L21/762
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