| 摘要 |
PURPOSE: An AOI(Automatic Optical Inspection) apparatus is provided to improve inspection efficiency by imaging a target object in different directions. CONSTITUTION: An AOI apparatus includes an X-Y stage(1), first illuminating units(2) which irradiate two-dimensional light to a target object in multiple directions, first and second mirror pairs(11,12) which reflect lattice light to the target object, a pair of first lattice projectors(21) which irradiate lattice light to the first mirrors, a pair of second lattice projectors which irradiate lattice light to the second mirrors, a first imaging unit(30) which captures the images reflected off the target images, and a controller(60) which inspects the target object based on the images from the first imaging unit.
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