| 摘要 |
A method for IC testing bigdata analysis and option value analysis includes: dividing a wafer into devices under test to undergo an electrical property test, retrieving data detected of the devices under test at different parameters; sorting specific parameters from different parameters according to an intended analysis result; loading a drawing software into a program, defining three-dimensional spatial coordinates, and producing a parameter location map of a three-dimensional cylindrical perspective graphic in three-dimensional spatial coordinates according to coordinate points X, Y, Z. |
| 主权项 |
1. A method for IC testing bigdata analysis and option value analysis, comprising the steps of:
obtaining data: dividing a test wafer into a plurality of test chips, each of the test chips being tested for electrical property and captured data under various parameters; sorting parameter: a specific parameter being sorted from the various parameters according to a requirement of an analysis result; defining three-dimensional space coordinates: compiling a program, defining a three-dimensional space coordinate in the program, comprising an X-coordinate axis, a Y-coordinate axis, and a Z-coordinate axis, wherein the X-coordinate axis and the Y-coordinate axis represent locations of the plurality of devices under test on the wafer, whereas the Z-coordinate axis represents the specific parameter; analyzing the specific parameter: in the program, calculating and analyzing all the specific parameters of the plurality of devices under test, so as to generate a plurality of reference values corresponding to the specific parameters; drawing a parameter location map: loading the program and the plurality of reference values into a drawing software, producing a parameter location map of a three-dimensional cylindrical perspective graphic according to a plurality of coordinate points X, Y, Z; wherein physical locations of the plurality of devices under test on the wafer are formed at graduations of the X-coordinate axis and the Y-coordinate axis, and, given the locations of the devices under test with respect to the graduations of the X-coordinate axis and the Y-coordinate axis, a three-dimensional cylindrical perspective graphic corresponding to the specific parameter is formed on the Z-coordinate axis according to the reference values thus obtained; wherein, with the parameter location map, it is feasible to dynamically rotate the X-coordinate axis, the Y-coordinate axis and the Z-coordinate axis to achieve different angles of view, and the three-dimensional cylindrical perspective graphic formed on the Z-coordinate axis displays difference in color to discern the specific parameters attributed to the devices under test. |
