DEVICE AND METHOD FOR EVALUATING CLEANLINESS OF A SURFACE

摘要

The device comprises a floodlight unit and a receiver unit and a processing unit. The floodlight unit applies an infrared light to the surface of a work piece, and comprises a surface light source and a focusing lens. The receiver unit receives the infrared light reflected from the surface of the work piece, and comprises a receiver sensor and a filter, which passes the infrared light that has the wavelength which contaminants on the surface absorb. The processing unit evaluates the cleanliness of the surface of the work piece according to the absorbance of the infrared light reflected from the surface. And a receiving area of the reflected infrared light from the surface is set smaller than an applying area of the applied infrared light to the surface.