MANUFACTURING METHOD OF MULTILAYER CERAMIC SUBSTRATE

摘要

PURPOSE: A manufacturing method of a multilayer ceramic substrate is provided to prevent generation of an inner defect at a high temperature and high humidity environment by filling polymer inside a ceramic multilayer. CONSTITUTION: A ceramic multilayer is formed by laminating a plurality of ceramic green sheets(111,112,121,122,123,131,132). Adjacent two ceramic green sheets among the ceramic green sheets have different thermal expansion coefficient. The ceramic multilayer is sintered at a temperature of 600°C ~ 1200°C. A polymer is filled inside the sintered ceramic multilayer. The polymer is a silicon or epoxy resin. Viscosity of the polymer is less than 100 centipoise. A capacitor is embedded in a multilayer ceramic substrate.