EMBEDDED PIEZOELECTRIC MICROCANTILEVER SENSORS

摘要

An apparatus and method for sensing chemical and/or biological analytes includes a deflectable arm (4) of a microcantilever (2) at lest partially embedded within a sensing element (18). A gaseous or liquid medium which may include the analyte being detected is introduced to the sensing element (18). The sensing element (18) undergoes volumetric expansion or contraction in the presence of the analyte sought to be detected, typically by adsorbing the analyte. The volumetric change of the sensing element causes the deflectable arm (4) includes at least one measurable physical property which changes when the arm deflects.