PROBE CARD HAVING REDISTRIBUTED WIRING PROBE NEEDLE STRUCTURE AND PROBE CARD MODULE USING THE SAME

摘要

PURPOSE: A probe card with a rewiring probe structure and a probe card module using the same are provided to test a silicon wafer according to the temperature history. CONSTITUTION: A probe card(40) with a rewiring probe structure includes a wafer(24,30) for the probe card, a penetration via electrode, and a rewiring probe structure. A plurality of penetration via electrodes(26a,32) pass through the wafer for the probe card. A rewiring probe structure(26b) of the twisted cage type is connected to the penetration via electrodes and is protruded from the one side of the wafer for the probe card.