发明名称 METHOD FOR PRODUCING A MONOLITHIC PIEZO ACTUATOR WITH STACK ELEMENTS, MONILITHIC PIEZO ACTUATOR WITH STACK ELEMENTS, AND USE OF THE PIEZO ACTUATOR
摘要 A piezoactuator has at least one piezoelectric-active partial stack with piezoceramic layers arranged one over the other with piezoceramic material and electrode layers arranged between the piezoceramic layers, at least one piezoelectric-inactive terminating region arranged over the partial stack and at least one transition region between the partial stack and the terminating region, the partial stack, the terminating region and the transition region all connected together to give a monolithic complete stack. The transition region has a transition region stack with piezoceramic layers arranged one over the other and electrode layers arranged between the piezoceramic layers both have a form and are arranged on each other such that, in the stack direction of the transition region stack, from piezoceramic layer to piezoceramic layer there is a successive rotation about a main axis of the polarity and/or a rotation of the main axis of the electric control is provided.
申请公布号 EP1908131(B1) 申请公布日期 2009.11.11
申请号 EP20060762839 申请日期 2006.07.26
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 SCHUH, CARSTEN;ZUMSTRULL, CLAUS
分类号 H01L41/083;H01L41/257;H01L41/273 主分类号 H01L41/083
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