| 摘要 |
<p>A manufacturing method of a substrate with through electrodes 14, comprising a substrate 11 having through holes 18, and through electrodes 14 received in the through holes 18, includes a through electrode formation step of forming the through electrodes 14 on a support plate, a substrate formation step of forming the substrate 11, a through electrode reception step of stacking the substrate 11 on the support plate and receiving the through electrodes 14 in the through holes 18, a resin filling step of filling gaps between side surfaces of the through electrodes and inner walls of the through holes of the substrate 11 with a resin 12, and a support plate removal step of removing the support plate after the resin filling step.
</p> |
