发明名称 |
REAGENT DISPENSING APPARATUS AND DELIVERY METHOD |
摘要 |
This invention relates to a vapor or liquid phase reagent dispensing apparatus having a metal seal aligned and in contact with hardened opposing flat surfaces of a top wall member and a protuberance on a side wall member, wherein the hardened opposing flat surfaces of the top wall member and the protuberance have a hardness greater than the hardness of the metal seal. The apparatus also has a temperature sensor and a source chemical level sensor extending through a centrally located portion of the top wall member and generally vertically downwardly to a sump cavity centrally located on a bottom wall member. The dispensing apparatus may be used for dispensing of reagents such as precursors for deposition of materials in the manufacture of semiconductor materials and devices. |
申请公布号 |
EP2115345(A2) |
申请公布日期 |
2009.11.11 |
申请号 |
EP20080728370 |
申请日期 |
2008.01.28 |
申请人 |
PRAXAIR TECHNOLOGY, INC. |
发明人 |
SPOHN, RONALD, F.;PETERS, DAVID, W. |
分类号 |
F17C9/00;B67D7/00;B67D99/00;F16J15/02 |
主分类号 |
F17C9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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