| 摘要 |
<p>In the semiconductor integrated circuit, an auxiliary conductor is formed in a wiring layer beneath a signal wire which connects a position Vin estimated to generate static electricity and a position Vout to be protected from static electricity. The capacitance of a glass substrate can be reduced to 1/1000 of the capacitance of the interlayer insulating film. Accordingly, even if a voltage of 1000 to 2000 V is generated between a substrate conveying system and the auxiliary conductor, the glass substrate works as a dielectric, and the voltage generated between the auxiliary conductor and signal wire is only several volts.</p> |
