IMPROVEMENTS RELATING TO PLASMA ETCHING,申请号EP20000940508-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	IMPROVEMENTS RELATING TO PLASMA ETCHING
摘要
申请公布号	EP1188180(B1)	申请公布日期	2009.11.11
申请号	EP20000940508	申请日期	2000.06.21
申请人	SURFACE TECHNOLOGY SYSTEMS PLC	发明人	ANAND, SRINIVASAN;CARLSTROM, CARL-FREDRIK;LANDGREN, GUNNAR
分类号	H01L21/302;H01L21/306;H05H1/46;H01L21/3065;H01L21/465	主分类号	H01L21/302
代理机构		代理人
主权项
地址

您可能感兴趣的专利

SIMULATOR TO ANALYZE PERFORMANCE OF VSAT SATELLITE COMMUNICATION NETWORK

RECORDING METHOD AND APPARATUS FOR ELECTRO-RHEOLOGICAL FLUID

DATA COLLECTION DEVICE

VEHICLE CARRIER RACK

ETHYLENE/.ALPHA.-OLEFIN/NONCONJUGATED POLYENE COPOLYMER RUBBER COMPOSITION

NITROGEN ABSORPTION WITH A DIVALENT CATION EXCHANGED LITHIUM X-ZEOLITE

POLYPEPTIDE DERIVATIVES OF HUMAN GRANULOCYTE COLONY STIMULATING FACTOR AND DNA, PLASMID , MICROORGANISM

SOWING POT ATTACHED SEED

FUEL VAPOR GAS CONTROL SYSTEM

METHOD FOR DISCRIMINATING POLARITY OF SYNCHRONIZATION SIGNAL

FILTER COEFFICIENT SETTING APPARATUS IN GHOST CANCELLING APPARATUS

METHOD AND APPARATUS FOR FABRICATING STIFFENER

A station class electrical surge arrester

CORRUGATE FORMING METHOD FOR 4 PILE STEEL TUBE

DISTRIBUTED SYSTEM AND SERVICE CONTROL OF INTELLIGENT NETWORK SERVICE CONTROL MANAGEMENT

DIFFERENTIAL LIMIT DEVICE

SYSTEM FOR IDENTIFYING LIVESTOCK AND OTHER INDIVIDUALS

FILTRATION DEVICE

TRACKING FILTER

Rolling Piston Type Expansion Machine