摘要 |
A process for manufacturing a multilayer wiring board including the steps of forming an insulating layer on a base provided with a bump for interlayer connection, bonding a copper foil onto the insulating layer by a thermocompression bonding by sandwiching the copper foil between stainless steel plates, and patterning the copper foil, in which a metal foil is interposed at least between each of the stainless plates and the copper foil at the time of the thermocompression bonding. At this time, a mold release layer is formed on a surface of the metal foil to be imposed. Thus, such a multilayer wiring board can be manufactured that prevents sticking of a product after molding (cementing of the copper foil) and excels in dimensional stability without occurrence of wrinkling and ruggedness. |
申请人 |
SONY CHEMICAL & INFORMATION DEVICE CORPORATION;TESSERA INTERCONNECT MATERIALS, INC. |
发明人 |
SHIMIZU, KAZUHIRO;YAGI, MASANOBU;HANAMURA, KENICHIRO;TAKAYASU, MITSUYUKI;NAGAI, KIYOE;IIJIMA, TOMOO |