发明名称 Optical measurement apparatus and method
摘要 An optical modulation spectroscopy system comprises a probe beam source and components for directing the probe beam at a sample. It also may comprise a modulated pump beam source and components for directing a modulated pump beam at the sample. A dispersive system may disperse the reflected probe beam into constituent wavelengths to provide dispersed beams. A detector array may detect multiple dispersed reflected probe beams and processes a signal corresponding to each. Thus, measurement may be multiplexed for very fast performance.
申请公布号 US7616307(B2) 申请公布日期 2009.11.10
申请号 US20080061542 申请日期 2008.04.02
申请人 KLA-TENCOR CORPORATION 发明人 MURTAGH MARTIN EDWARD;KELLY PATRICK VINCENT;SOMEKH MICHAEL GEOFFREY;PITTER MARK CHARLES;SHARPLES STEPHEN DAVID
分类号 G01J3/26 主分类号 G01J3/26
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