发明名称 |
Device for controlling the frequency of resonance of an oscillating micro-electromechanical system |
摘要 |
A device for controlling the frequency of resonance of an oscillating micro-electromechanical system includes: a microstructure, having a first body and a second body, which is capacitively coupled to the first body and elastically oscillatable with respect thereto at a calibratable frequency of resonance, a relative displacement between the second body and the first body being detectable from outside; and an amplifier coupled to the microstructure for detecting the relative displacement. DC decoupling elements are arranged between the amplifier and the microstructure.
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申请公布号 |
US7616078(B2) |
申请公布日期 |
2009.11.10 |
申请号 |
US20070864424 |
申请日期 |
2007.09.28 |
申请人 |
STMICROELECTRONICS S.R.L. |
发明人 |
PRANDI LUCIANO;LASALANDRA ERNESTO;UNGARETTI TOMMASO |
分类号 |
H03H9/125;G01C19/56;H03H3/013;H03H9/52 |
主分类号 |
H03H9/125 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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