发明名称 |
D/A converter circuit, semiconductor device incorporating the D/A converter circuit, and manufacturing method of them |
摘要 |
D/A conversion having higher accuracy is provided by improving relative accuracy of the resistance value of resistors which configure a resistor string. A manufacturing method of a D/A converter circuit of the invention comprises the steps of: forming a resistor string 11 which includes a plurality of resistors R0 to R7 connected in series with each other between reference voltages, and a plurality of switching elements S0 to S3 connected with each connection node of the resistors R0 to R7, wherein: each of the resistors R0 to R7 is a thin film element crystallized by linear laser irradiation; disposing all forming parts of the resistors configuring the resistor string 11 within a laser irradiation area 19; and crystallizing all the forming parts of the resistors which are disposed within the laser irradiation area with the same laser shot.
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申请公布号 |
US7615824(B2) |
申请公布日期 |
2009.11.10 |
申请号 |
US20060432349 |
申请日期 |
2006.05.12 |
申请人 |
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.;SHARP KABUSHIKI KAISHA |
发明人 |
KOYAMA JUN;MIYAKE HIROYUKI;TAKAHASHI KEI;MIYATA KAZUHIKO |
分类号 |
H01L23/62;H01L27/04;H01L21/02;H01L21/268;H01L21/822;H01L27/08;H03M1/68;H03M1/76 |
主分类号 |
H01L23/62 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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