Shower-head type gas supplying device and supplying method for thin film-deposition apparatus,申请号KR20070122722-传众专利搜索

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发明名称	Shower-head type gas supplying device and supplying method for thin film-deposition apparatus
摘要
申请公布号	KR100926187(B1)	申请公布日期	2009.11.10
申请号	KR20070122722	申请日期	2007.11.29
申请人		发明人
分类号	H01L21/20	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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