发明名称 Cyclic error compensation in interferometry systems
摘要 An interference signal S(t) is provided from interference between two beams directed along different paths. The signal S(t) is indicative of changes in an optical path difference n{tilde over (L)}(t) between the different paths, where n is an average refractive index along the different paths, {tilde over (L)}(t) is a total physical path difference between the different paths, and t is time. An error signal is provided to reduce errors in an estimate of {tilde over (L)}(t). The error signal is derived at least in part based on one or more collective properties of a distribution of multi-dimensional values. At least one of the multi-dimensional values in the distribution is generated from a plurality of samples of the signal S(t) (e.g., samples of the signal captured at different times).
申请公布号 US7616322(B2) 申请公布日期 2009.11.10
申请号 US20060462185 申请日期 2006.08.03
申请人 ZYGO CORPORATION 发明人 HILL HENRY A.;DEMAREST FRANK C.;FIELD ALAN H.
分类号 G01B11/02 主分类号 G01B11/02
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