摘要 |
A semiconductor memory device includes: a first conductive layer; a second conductive layer; a first insulating film; a first plug; a second plug; a second insulating film having a first opening and a second opening; a first metal film; a second metal film; a first capacitor insulating film formed on the first metal film; a second capacitor insulating film formed on the second metal film; and a third metal film. The second metal film is formed so that an end thereof located away from the first opening extends onto the top surface of the second insulating film. The second metal film is connected at its extending portion to the third metal film.
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