发明名称 Ferroelectric device having a contact for taking the potential of a metal film and a plurality of capacitors positioned periodically
摘要 A semiconductor memory device includes: a first conductive layer; a second conductive layer; a first insulating film; a first plug; a second plug; a second insulating film having a first opening and a second opening; a first metal film; a second metal film; a first capacitor insulating film formed on the first metal film; a second capacitor insulating film formed on the second metal film; and a third metal film. The second metal film is formed so that an end thereof located away from the first opening extends onto the top surface of the second insulating film. The second metal film is connected at its extending portion to the third metal film.
申请公布号 US7615814(B2) 申请公布日期 2009.11.10
申请号 US20070702536 申请日期 2007.02.06
申请人 PANASONIC CORPORATION 发明人 NOMA ATSUSHI;ITO TOYOJI
分类号 H01L27/115 主分类号 H01L27/115
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