| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of obtaining a buffer layer of high quality which is adaptive to a large-sized substrate, reduces the consumption of a material solution, and has superior film thickness uniformity in film deposition of a buffer layer for a chalcopyrite thin film solar cell. <P>SOLUTION: An apparatus for manufacturing a solar cell includes a heater-incorporated susceptor which supports and heats a substrate on which a back electrode layer having a p-type light absorption layer containing group I, III, and VI elements is formed, a heating means of additionally heating the susceptor, a chemical mixing means of mixing and sending reducing chemicals and material chemicals to a chemical introduction nozzle, the chemical introduction nozzle which drips the mixed chemicals onto the substrate, and a reactor vessel which holds the dripped mixed chemicals. The method of manufacturing the solar cell includes a step of forming the p-type light absorption layer, containing at least group I, III and VI elements, of the back electrode layer formed on the substrate, a step of forming an n-type buffer layer on the light absorption layer, and a step of forming a transparent electrode layer on the buffer layer, and in the step of forming the buffer layer, the mixed chemicals are dripped on the heated substrate and held and further chemicals are intermittently supplied. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
