| 摘要 |
PROBLEM TO BE SOLVED: To provide a CNF probe cantilever for performing stable high-resolution measurement while an unnecessary CNF is not formed in a lever section. SOLUTION: This CNF probe cantilever includes a support section, the lever section 1 extended from the support section, a projection-like probe section 2 formed at or near a free end of the lever section, and a CNF narrow line 3 formed at the tip of the probe section by supply of carbon compound and irradiation of a high energy beam. The outer rim of the free end of the lever section is formed to have a round shape having no corner. COPYRIGHT: (C)2010,JPO&INPIT
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