| 摘要 |
A method includes measuring spectral responses of at least first and second sections of a measurement mark. In the first section, individual ones of primary lines of a first width are arranged at a first pitch and in alternating order with secondary lines spaced from the primary lines at a first distance. In the second section, individual ones of further primary lines of a second, different width are arranged at the first pitch and in alternating order with further secondary lines that are spaced from the further primary lines at the first distance. From at least the first and second spectra, information on a difference between target and actual widths of the primary and secondary lines may be obtained.
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