发明名称 |
METHODS AND APPARATUS FOR WAFER AREA PRESSURE CONTROL IN AN ADJUSTABLE GAP PLASMA CHAMBER |
摘要 |
In a plasma processing chamber, a method and an arrangement to stabilize pressure are provided. The method includes providing coarse pressure adjustments in an open-loop manner and thereafter providing fine pressure adjustments in a closed-loop manner. The coarse pressure adjustments are performed by rapidly re-position confinement rings employing an assumed linear relationship between the conductance and the confinement rings position to bring the pressure in the plasma generating region quickly to roughly a desired set point. The fine pressure adjustments are performed by at least employing mechanical vacuum pump(s), turbo pump(s), confinement ring positioning and/or combinations thereof to achieve a derive pressure set point. |
申请公布号 |
WO2009100345(A3) |
申请公布日期 |
2009.11.05 |
申请号 |
WO2009US33410 |
申请日期 |
2009.02.06 |
申请人 |
LAM RESEARCH CORPORATION;DHINDSA, RAJINDER;ROGERS, JAMES H. |
发明人 |
DHINDSA, RAJINDER;ROGERS, JAMES H. |
分类号 |
H05H1/34;H05H1/36 |
主分类号 |
H05H1/34 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|