WATER-REACTIVE AL COMPOSITE MATERIAL, WATER-REACTIVE AL FILM, METHOD FOR PRODUCTION OF THE AL FILM, AND STRUCTURAL MEMBER FOR FILM-FORMING CHAMBER

摘要

Disclosed is a water-reactive Al composite material which comprises: an Al component selected from 2NAI to 5NAI each having a content of an impurity Cu of 40 ppm or less; and at least one metal selected from In in an amount of 2 to 5 wt% and Bi in an amount of 0.7 to 1.4 wt% both relative to the amount of Al.  Also disclosed is a water-reactive Al film produced by using the material.  Further disclosed is a method for producing the Al film.  Still further disclosed is a structural member for a film-forming chamber, which comprises the water-reactive Al film on its surface.