| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage system enabling alleviation of vibration or drift at a high level and positioning accuracy, which are required for a sample stage of a scanning electron microscope used in a field of semiconductor manufacturing. SOLUTION: The sample stage 3 that is the stage system includes: tables (a center table 5 and a top table 6) constrained by a guide means, thereby moving on a stationary element in a constant direction; a positioning control device carrying out positioning control of the tables by controlling movement and stoppage of the tables; first braking mechanisms 30, 32 adding fixed brake by constant frictional force between the tables and the stationary element; and second braking mechanisms 31, 33 driven at stopping of the tables to put brake on the tables. COPYRIGHT: (C)2010,JPO&INPIT
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