摘要 |
PROBLEM TO BE SOLVED: To provide an adamantane derivative having a polymerizable unsaturated group, on making it a polymer, imparting high flexibility and excellent organic solvent solubility, and also imparting useful properties to a resin for photoresist, such as etching resistance, crosslinking reactivity, etc. SOLUTION: This adamantane derivative having a polymerizable unsaturated group is expressed by formula (1) [wherein, R<SP>1</SP>is H or a 1-6C alkyl; (q), (n) are each an integer of ≥1; (m), (p) are each 0 or an integer of ≥1; (p+m) is ≥1; and when the (m) is ≥2, m(n)s are the same or different, provided that when (q)=1 and also (p)=0, (m) is an integer of ≥2, or (n) is an integer of ≥2]. COPYRIGHT: (C)2010,JPO&INPIT
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