发明名称 PROCESS FOR FABRICATING A HIGH-INTEGRATION-DENSITY IMAGE SENSOR
摘要 The invention relates to the fabrication of an electronic component having a very high integration density, notably an image sensor. The component comprises two, superposed integrated circuits, one of which one (the image sensor) is formed on the front side of a thinned first silicon substrate (12) and the other of which is produced on the front side of a second substrate (30), with an insulating planarization layer (28, 48) interposed between the front sides of the two substrates. The silicon (12) of the backside of the thinned substrate is opened locally above a first conducting area (P1) located in the thinned substrate and above a second conducting area (P2) located in the second substrate. A conducting layer portion (50), deposited on both areas, electrically connects them so as to provide the interconnection between the two circuits. The external connection pads (PL1) may also be formed in this conducting layer (50).
申请公布号 US2009275165(A1) 申请公布日期 2009.11.05
申请号 US20070518456 申请日期 2007.12.11
申请人 POURQUIER ERIC 发明人 POURQUIER ERIC
分类号 H01L31/18;H01L21/762;H01L27/146 主分类号 H01L31/18
代理机构 代理人
主权项
地址