发明名称 POSITIONING DEVICE, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a positioning device for reducing a load imposed on an actuator positioning a table. <P>SOLUTION: The positioning device includes: a stage movably attached on a platen; a first drive means for driving the stage; the table movable for the stage while an object to be positioned is held; a thrust force generating means provided on the stage and generating a thrust force imparted to the table; a second drive means for driving the table; a table control means for controlling the second drive means; and a thrust force control means for controlling the thrust force generating means. In the positioning device, a control command of the thrust force generating means is set based on a control output value of the table control means. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009259869(A) 申请公布日期 2009.11.05
申请号 JP20080104025 申请日期 2008.04.11
申请人 CANON INC 发明人 MARUYAMA TOMOJI;ITO YASUAKI;HASHIMOTO AKIHITO
分类号 H01L21/027;G03F7/20;H01L21/68 主分类号 H01L21/027
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