| 摘要 |
<P>PROBLEM TO BE SOLVED: To achieve a screening inspection of a semiconductor integrated circuit provided with a circuit section having a plurality of FETs connected in a multi-stage series connection without increasing the number of inspection terminals. Ž<P>SOLUTION: When a screening voltage is applied between one end side (PAD1) and the other end side (PAD2) of a multi-stage series circuit section 5, a screening inspection is performed by applying a gate voltage to turn FET2 to be inspected off and all the other FETs 1, 3, 4 on. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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