| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide gas analysis device enabling measurement of a partial pressure ratio of a kind of gas in a decompressed atmosphere as well as a total pressure and capable of measuring partial pressures of various kinds of gas accurately. Ž<P>SOLUTION: The gas analysis device is composed of an ion source which is composed of a cylindrical grid and a filament arranged on its outer side and ionizes gas, an extraction electrode for extraction ion, which is placed near on end portion of the grid and is arranged on the same axis with its central axis, a mass spectrograph for assorting out the extracted ion, a partial pressure collector for detecting ion of which the mass is sorted out, and a total pressure collector arranged on the central axis. Two regions of different electric field directions are formed simultaneously in the grid, or two conditions of different electric field direction are formed alternately, and the total pressure and partial pressure ratio of mixed gas can be measured by currents flowing in the total pressure collector and the partial pressure collector. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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